Recent research results on laser-assisted nanomachining, nanolithography and nanodeposition will be presented. Ultra-fast and nanosecond pulsed lasers have been coupled to near-field-scanning optical microscopes (NSOMs) through apertured bent cantilever fiber probes as well as with atomic force microscope (AFM) tips in apertureless configurations. Experiments have been conducted on the surface modification of metals, polymers and semiconductor materials in both ambient air and controlled environments. By combining nanoscale ablative material removal with subsequent chemical etching steps, ablation nanolithography and patterning of fused silica and crystalline silicon wafers has been demonstrated. Confinement of laser-induced crystallization to nanometric scales has also been shown. Nucleation and growth of semiconductor materials has been achieved by Laser Chemical Vapor Deposition (LCVD) at the nanoscale level. Related work on nanoengineering applications will be discussed. The concept of effective laser curing of nanoparticle suspensions (NPS) with a laser beam is presented. The work is based on the significant depression of the melting point of nanoparticles compared to bulk gold. Using a modified drop on demand jetting system, the gold nanoparticle suspended solution is printed glass and polymer substrates and cured with laser irradiation. Microlines of low resistivity are produced.
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