Tuesday, 12 October 2004 - 5:10 PM

This presentation is part of : Sub-wavelength Nanostructuring I

Laser Nanoimprinting of Hemispherical Cavity Arrays on Silicon and Metal Substrates and Self-assembled Dual-size Nanoparticles

Lipan Li, Yongfeng Lu, David W. Doerr, and Dennis R. Alexander. University of Nebraska-Lincoln, Lincoln, NE 68588

An approach to fabricate hemispherical-cavity arrays on silicon (Si) and aluminum (Al) substrates using laser nanoimprinting will be presented. A monolayer of silica particles, can be self-assembled on a Si or Al substrate. It is found that periodical hemispherical cavities can be created on the substrate surface by laser irradiation (KrF excimer laser, =248 nm) while the nanoparticle on the substrate surface is impressed by a quartz plate. The influences of the particle size, laser fluence and the substrate initial temperature on the cavity sizes and features have been investigated. Scanning electron microscopy (SEM) was performed to observe the dimensions of the cavities. The size of the particles ranges from 0.16 to 5 µm. The size of the created cavities is dependent both on the particle size and laser fluence. It is easier to form cavities on substrates with higher initial temperature. One-dimensional thermal calculation was employed to understand the thermal effects in this process. Three-dimensional optical simulation provided an accurate insight into the light intensity enhancement induced by the optical resonance in the particles. Raman spectroscopy was used to examine the stress induced by the laser imprinting process resided in the cavity structures. Furthermore, self-assembly of dual-size nanoparticles has been achieved and its application on the laser nanoimprinting has been investigated.

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