Monday, 11 October 2004 - 4:20 PM

This presentation is part of : Femtosecond Laser Micro/nano-machining I


S.M. Yalisove, A. Hunt, J. Nees, Y.N. Picard, H. Liu, P.A. Vanrompay, J.P. McDonald, C.Q. Feng, T. Pollock, and G. Mourou. University of Michigan, Ann Arbor, MI 48109

S.M.Yalisove1,4, A. Hunt, J. Nees, Y.N.Picard1,4, H.Liu2,4, P. Vanrompay1,4, J.P.McDonald3,4, C.Q.Feng1,4, T. Pollock1,4, G. Mourou2,4

1Department of Materials Science and Engineering 2Department of Electrical Engineering 3Applied Physics Program 4Center for Ultrafast Optical Science

Ultrafast laser pulses of high intensity light interact with matter quite differently than pulses longer than a picosecond. The primary effect of the ultrashort pulse length is the determinism that is observed for thresholds such as the ablation threshold, the laser induced breakdown spectroscopy (LIBS) threshold, modification threshold and the damage threshold. Results will be presented that demonstrate; (1) an ability to produce feature sizes as small as 30nm from 600 nm wavelength light, (2) an ability to confine collateral damage to less than 10 nm, (3) modification thresholds for 1-2nm thick amorphous films, and (3) models which explain our results.

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