We present recent developments in the nanofabrication of nanocomposite materials relevant to microelectromechanical systems and “smart” surfaces. We focus on the nanoprobing of these complex, organized surface nanostructures with atomic force microscopy (AFM) including a complex gradient of elastic properties along the surface normal. The applicability of this model for bi- and tri-layer polymer-organic films with an overall thickness below 50 nm is demonstrated. Several examples of the fabrication of the complex surface nanostructures and the nanoprobing of various surfaces in air, fluid, and at variable temperatures are presented. An alternative approach of fabricating and nanomechanical testing of free-suspended nanoscale films is discussed as well.
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