Monday, 11 October 2004 - 5:10 PM

This presentation is part of : Femtosecond Laser Micro/nano-machining I

Femtosecond Laser Micromachining of Quartz

David W. Doerr and Dennis R. Alexander. Dept. of Electrical Engineering and Center for Electro-Optics, 209N WSEC, Lincoln, NE 68588-0511

Slots are laser cut in 75 micron thick AT-cut quartz samples using 50 femtosecond laser pulses. The processed area is examined by optical and scanning electron microscope to determine the quality of the laser processed area and depth of cuts. Material ablation rates are determined for fluences from 2-16 J/cm2, for different scan speeds and number of passes. High quality cuts are observed for fluences below 13 J/cm2, while microcracking surrounding the cut is observed at a fluence of 16 J/cm2.

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